Maro Publications

Chemical Vapor Deposition (CVD)

Patent Titles

*06/15/2015
from 2/20/2013

Maro Encyclopedia

Chemical Vapor Deposition (CVD) Applications

Coatings

Decorating

Sputtering

xxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxx 

Patent Titles

For earlier patent titles, go to Sorted Patents /Coatings /Chemical Vapor Deposition (CVD).

3/17/2015

8,980,382
Oxygen-doping for non-carbon radical-component CVD films

3/10/2015

8,974,872
Method of manufacture of multilayer film

8,974,858
Method of depositing organic material

8,974,649
Combinatorial RF bias method for PVD

3/3/2015

8,967,081
Device and process for chemical vapor phase treatment

2/24/2015

8,962,495
Film deposition method

8,962,454
Method of depositing dielectric films using microwave plasma

8,962,350
Multi-step deposition of ferroelectric dielectric material

8,962,078
Method for depositing dielectric films

8,962,077
Vapor deposition particle emitting device, vapor deposition method.

8,961,692
Evaporating apparatus

8,961,691
Film deposition apparatus, film deposition method, computer readable storage medium for storing a program causing the apparatus to perform the method

8,961,689
Systems and methods for distributing gas in a chemical vapor deposition reactor

2/17/2015

8,956,709
Deposition method and manufacturing method of light-emitting device

8,956,686
Radiation image conversion panel and preparation method thereof

8,956,458
Vapor deposition device and vapor deposition method

8,956,456
Apparatus and method for atomic layer deposition

2/3/2015

8,945,339
Film formation apparatus

8,945,305
Methods of selectively forming a material using parylene coating

1/27/2015

8,941,002
Oxide evaporation material, vapor-deposited thin film, and solar cell

8,940,623
Process for obtaining an array of nanodots

8,940,374
Nanolayer deposition process

8,940,368
Vapor deposition apparatus and vapor deposition method

8,940,367
Coating device and coating method

8,940,240
Apparatus and method for manufacturing composite nano particles

8,939,108
Processing system

8,939,107
Confined pulsed laser deposition method for depositing metastable thin film

1/20/2015

8,937,023
Method of manufacturing porous insulating film

8,937,000
Chemical vapor deposition with elevated temperature gas injection

1/13/2015

8,932,963
Film deposition method

8,932,676
Method for producing gas barrier plastic molded body

8,932,675
Methods for depositing silicon carbo-nitride film

8,932,674
Vapor deposition methods of SiCOH low-k films

8,932,673
Methods of fabricating large-area graphene

8,931,432
Vacuum processing apparatus

8,931,431
Nozzle geometry for organic vapor jet printing

1/6/2015

8,927,440
Film deposition apparatus and method of depositing film

8,927,051
Method for manufacturing a compound film

12/30/2014

8,920,877
Preparation of epitaxial graphene surfaces for atomic layer deposition of dielectrics

8,920,875
Cyclooctatetraenetricarbonyl ruthenium complex, method of producing the same, and method of producing film using the complex as raw material

8,920,565
Metalorganic chemical vapor deposition reactor

8,920,361
Plasma treatment and plasma enhanced chemical vapor deposition onto temperature sensitive biological materials

12/23/2014

8,916,480
Chemical vapor deposition film profile uniformity control

8,916,237
Thin film deposition apparatus and method of depositing thin film

12/16/2014

8,911,827
Chemical vapor deposition method using an organoplatinum compound

8,911,601
Deposition ring and electrostatic chuck for physical vapor deposition chamber

8,911,555       
Method and device for coating substrates from the vapor phase

11/25/2014

8,895,456 
Method of depositing a film 

8,895,356 
Chemical vapor deposition apparatus and method of forming semiconductor epitaxial thin film using the same 

8,895,115 
Method for producing an ionized vapor deposition coating 

8,895,107 
Chemical vapor deposition with elevated temperature gas injection 

11/18/2014

8,889,225 
Chemical vapor deposition of fluorocarbon polymers 

8,889,224 
Method of forming parylene film 

8,889,223 
Physical vapor deposition apparatus and physical vapor deposition method 

8,889,214 
Deposition amount measuring apparatus, depositing apparatus including the same, and method for manufacturing light emitting display 

8,887,650 
Temperature-controlled purge gate valve for chemical vapor deposition chamber 

11/11/2014

8,883,947 
Method of forming thin film 

8,883,676 
Removal of toxic chemicals using metal-organic frameworks (MOFs) post-treated via plasma-enhanced chemical vapor deposition (PECVD) with fluorocarbons 

8,883,655 
Atomic layer deposition of metal oxide materials for memory applications 

8,883,268 
Method and device for producing a parylene coating 

8,883,267 
Vapor deposition apparatus, vapor deposition method, and method of manufacturing organic light-emitting display apparatus 

8,883,266 
Irradiation assisted nucleation of quantum confinements by atomic layer deposition 

8,883,259  
Thin film deposition apparatus 

8,883,246 
Plasma activated chemical vapour deposition method and apparatus therefor 

8,882,922 
Organic layer deposition apparatus 

8,882,921 
Thin film deposition apparatus 

8,882,920 
Thin film deposition apparatus 

8,882,918 
Vapor deposition apparatus 

8,882,917 
Substrate processing including correction for deposition location  

8,882,916 
Film deposition apparatus, film deposition method, and computer readable storage medium 

8,882,915 
Film deposition apparatus, film deposition method, and computer readable storage medium 

8,882,913 
Apparatus of chemical vapor deposition with a showerhead regulating injection velocity of reactive gases positively and method thereof 

8,882,556 
Thin film deposition apparatus, method of manufacturing organic light-emitting display device by using the apparatus, and organic light-emitting display device manufactured by using the method 

11/04/2014

8,877,300 
Atomic layer deposition using radicals of gas mixture 

8,876,976 
Chemical vapor deposition apparatus for equalizing heating temperature 

8,876,975 
Thin film deposition apparatus 

8,876,974 
Chemical vapor deposition apparatus capable of controlling discharging fluid flow path in reaction chamber 

10/28/2014

8,871,654 
Film deposition apparatus, and method of depositing a film 

8,871,302 
Chemical vapor deposition of graphene on dielectrics 

8,871,027 
Electrical contacts for use with vacuum deposition sources 

10/21/2014

8,865,259 
Method and system for inline chemical vapor deposition 

8,864,956 
Multi-component deposition 

12/3/2013

74. 8,598,049 
Deposition method 

73. 8,597,473 
Reactive physical vapor deposition with sequential reactive gas injection 

11/26/2013

72. 8,592,005 
Atomic layer deposition for controlling vertical film growth 

11/19/2013      

71. 8,585,823 
CVD apparatus having a rotating heater 

11/12/2013      

70. 8,580,670 
Migration and plasma enhanced chemical vapor deposi

11/5/2013      

69. 8,574,367 
Evaporation source 

10/22/2013      

68. 8,562,743 
Method and apparatus for atomic layer deposition 

10/8/2013

67. 8,551,890 
Showerhead for CVD depositions 

66. 8,551,564 
Chemical vaporizer for material deposition systems and associated methods 

65. 8,551,248
Showerhead for CVD depositions

9/24/2013      

64. 8,540,851 
Physical vapor deposition with impedance matching network 

8/27/2013       

63. 8,518,488 
Method for using apparatus configured to form germanium-containing film 

62. 8,518,487 
Method of forming organic film

8/20/2013       

61. 8,512,798 
Plasma assisted metalorganic chemical vapor deposition (MOCVD) system

60. 8,512,526 
Method of performing physical vapor deposition with RF plasma source power applied to the target using a magnetron 

8/13/2013       

59. 8,507,039 
Method for growing thin films 

58. 8,507,038 
Substrate having a coating comprising copper and method for the production thereof by means of atomic layer deposition 

8/6/2013         

57. 8,501,275 
Enhanced deposition of noble metals

56. 8,501,145 
Method for growing carbon nanowalls 

55. 8,501,143 
Single crystal diamond prepared by CVD 

7/23/2013       

54. 8,491,967 
In-situ chamber treatment and deposition process 

7/16/2013       

53. 8,486,196 
Vaporizing apparatus and film forming apparatus provided with vaporizing apparatus 

7/9/2013      

52. 8,481,121 
Methods of forming thin metal-containing films by chemical phase deposition 

51. 8,481,120 
Method for coating a substrate and metal alloy vacuum deposition facility 

50 8,481,119 
Bisamineazaallylic ligands and their use in atomic layer deposition methods 

49. 8,480,805 
System and method for sealing a vapor deposition source 

48. 8,479,683 
Apparatus including a plasma chamber and controller including instructions for forming a boron nitride layer 

7/2/2013       

47. 8,476,638  
Plasma CVD apparatus 

46. 8,475,943 
Coated article having yttrium-containing coatings applied by physical vapor deposition and method for making the same 

6/25/2013       

45. 8,470,720 
Film forming apparatus and film forming method 

44. 8,470,718 
Vapor deposition reactor for forming thin film

43. 8,470,456 
Layer system for the formation of a surface layer on a surface of a substrate and also vaporization source for the manufacture of a layer system 

42. 8,470,403 
Organic thin film deposition device, organic EL element manufacturing device, and organic thin film deposition method 

41. 8,470,402 
Method of depositing a metal-containing dielectric film 

40. 8,470,401 
Use of group V metal containing precursors for a process of depositing a metal containing film 

39. 8,470,400 
Graphene synthesis by chemical vapor deposition 

6/18/2013       

38. 8,465,903 
Radiation patternable CVD film 

37. 8,465,811 
Method of depositing film by atomic layer deposition with pulse-time-modulated plasma 

36. 8,465,802 
Chemical vapor deposition reactor and method 

6/11/2013      

35. 8,460,753 
Methods for depositing silicon dioxide or silicon oxide films using aminovinylsilanes 

34. 8,460,752 
High-throughput CVD system

6/4/2013    

33. 8,455,095 
Article and method for manufacturing same 

32. 8,455,060 
Method for depositing hydrogenated diamond-like carbon films using a gas cluster ion beam

31. 8,455,049 
Strontium precursor for use in chemical vapor deposition, atomic layer deposition and rapid vapor deposition 

5/28/2013

30. 8,449,942 
Methods of curing non-carbon flowable CVD films

5/21/2013     

29. 8,443,630 
Internal vapour deposition process 

4/30/2013   

28. 8,430,970 
Methods for preventing corrosion of plasma-exposed yttria-coated constituents 

27. 8,430,966 
Vapor deposition apparatus and process for continuous deposition of a thin film layer on a substrate 

26. 8,430,963 
Cool-down system and method for a vapor deposition system 

25. 8,430,962 
Gas supply device, substrate processing apparatus and substrate processing method 

24. 8,430,961 
Source gas flow path control in PECVD system to control a by-product film deposition on inside chamber 

23. 8,430,960 
Deposition systems and susceptor assemblies for depositing a film on a substrate 

4/23/2013

22. 8,425,987 
Surface charge enhanced atomic layer deposition of pure metallic films 

21. 8,425,979 
Maskant free diffusion coating process 

4/16/2013

20. 8,420,169 
Method of manufacturing organic thin film 

19. 8,420,168 
Delivery device for deposition 

18. 8,419,911 
Deposition method by physical vapor deposition and target for deposition processing by physical vapor deposition 

17. 8,419,905 
Method for forming a diamond-like carbon layer on air bearing surface of a slider 

16. 8,419,857 
Electron beam vapor deposition apparatus and method of coating 

4/9/2013

15. 8,415,259 
Method of depositing dielectric film by modified PEALD method 

14. 8,415,257 
Enhanced adhesion of PECVD carbon on dielectric materials by providing an adhesion interface 

3/26/2013

13. 8,404,878 
Titanium-containing precursors for vapor deposition 

12. 8,404,315 
Process for manufacturing permeable dielectric films 

11. 8,404,314 
Plasma CVD apparatus, method for forming thin film and semiconductor device 

10. 8,404,047 
Electron beam vapor deposition apparatus and method 

9. 8,402,917 
Mask frame assembly for thin film deposition and associated methods 

8. 8,402,916 
Deposition mask 

3/19/2013

7. 8,399,047 
Multifunctional CVD coatings 

6. 8,398,769 
Chemical vapor deposition apparatus 

3/12/2013

5. 8,394,201 
Atomic layer deposition apparatus 

3/5/2013

4. 8,389,421 
Film formation method and film formation apparatus 

2/26/2013

3. 8,383,451 
Deposition of photovoltaic thin films by plasma spray deposition 

2/19/2013

2. 8,377,211 
Device for vacuum processing 

2/12/2013

1. 8,372,760 
Method and system for using ion implantation for treating a low-k dielectric film 

xxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxx 

Interested!!
Bookmark this page to follow future developments!.
(RDC 6/5/2012)

xxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxx 

Roger D. Corneliussen
Editor
www.maropolymeronline.com

Maro Polymer Links
Tel: 610 363 9920
Fax: 610 363 9921
E-Mail: cornelrd@bee.net  

***********************************

Copyright 2012 by Roger D. Corneliussen.
No part of this transmission is to be duplicated in any manner or forwarded by electronic mail without the express written permission of Roger D. Corneliussen
**************************************

** Date of latest addition; date of first entry is 2/20/2013.