Maro Publications

Plasma Treatment

Patent Titles

From 02/09/2015 
to 2/5/2013

Maro Topics

Plasma Treatment: Patent Abstracts

Plasma Treatment: Notes

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Patent Titles

For previous patents, go to Sorted Patents /Reactions /Plasma.

12/2/2014

8,901,008 
Substrate plasma-processing apparatus 

8,900,674 
Method of coating a substrate 

8,900,405 
Plasma immersion ion implantation reactor with extended cathode process ring 

8,900,404 
Plasma processing systems with mechanisms for controlling temperatures of components 

8,900,405 
Plasma immersion ion implantation reactor with extended cathode process ring 

8,900,404 
Plasma processing systems with mechanisms for controlling temperatures of components 

8,900,403 
Semiconductor processing system having multiple decoupled plasma sources 

8,900,402 
Semiconductor processing system having multiple decoupled plasma sources 

8,900,401 
Plasma processing method and apparatus 

8,900,398 
Local plasma confinement and pressure control arrangement and methods thereof 

11/25/2014

8,894,806 
Plasma processing apparatus and plasma processing method 

8,894,805 
Electron beam plasma source with profiled magnet shield for uniform plasma generation 

8,894,804 
Plasma unconfinement sensor and methods thereof 

11/18/2014

8,890,410 
Plasma generation device 

8,890,409 
Microcavity and microchannel plasma device arrays in a single, unitary sheet 

8,889,435 
Plasma density control 

8,889,023 
Plasma processing apparatus and plasma processing method 

8,889,021 
Process condition sensing device and method for plasma chamber 

8,888,951 
Plasma processing apparatus and electrode for same 

8,888,950 
Apparatus for plasma processing and method for plasma processing 

8,888,949 
Plasma processing equipment and gas distribution apparatus thereof 

8,888,948 
Apparatus and method for controlling relative particle concentrations in a plasma 

11/11/2014

8,884,181 
Method of generating low-energy secondary electrons for applications in biological sciences, radiochemistry, and chemistry of polymers and physics of radiotherapy 

8,884,180 
Over-voltage protection during arc recovery for plasma-chamber power supplies 

8,884,179 
Torch flow regulation using nozzle features 

8,884,178 
Methods and apparatus for igniting and sustaining plasma 

8,883,025 
Plasma processing apparatus and plasma processing method 

8,882,962 
Plasma processing apparatus 

11/04/2014

8,877,654 
Pulsed plasma to affect conformal processing 

8,877,301 
Plasma processing including asymmetrically grounding a susceptor 

8,877,299 
Method for enhancing a substrate using gas cluster ion beam processing 

8,877,005 
Plasma processing apparatus and electrode used therein 

8,877,004 
Plasma processing apparatus and plasma processing method 

8,877,002 
Internal member of a plasma processing vessel 

10/28/2014

8,869,742 
Plasma processing chamber with dual axial gas injection and exhaust 

8,869,741 
Methods and apparatus for dual confinement and ultra-high pressure in an adjustable gap plasma chamber 

10/21/2014

8,864,935 
Plasma generator apparatus 

8,864,934 
Plasma processing apparatus, plasma processing method, and storage medium 

8,864,932 
Plasma processing apparatus, electrode temperature adjustment device and electrode temperature adjustment method 

1/7/2014

123. 8,623,471 
Plasma treatment system 

122. 8,623,171 
Plasma processing apparatus 

12/31/2013

121. 8,617,351 
Plasma reactor with minimal D.C. coils for cusp, solenoid and mirror fields for plasma uniformity and device damage reduction 

120. 8,617,350 
Linear plasma system 

119. 8,617,349 
Showerhead assembly for plasma processing chamber 

12/24/2013

118. 8,613,828 
Procedure and device for the production of a plasma 

117. 8,613,827 
Plasma treatment system 

12/17/2013

116. 8,609,549  Plasma etching method, plasma etching apparatus, and computer-readable storage medium 

115. 8,609,203 
Method and apparatus for plasma surface treatment of moving substrate 

114. 8,608,903 
Plasma processing apparatus and plasma processing method 

113. 8,608,902 
Plasma processing apparatus 

112. 8,608,852 
Temperature controlled plasma processing chamber component with zone dependent thermal efficiencies 

111. 8,608,851 
Plasma confinement apparatus, and method for confining a plasma 

12/10/2013

110. 8,604,379 
Plasma source with integral blade and method for removing materials from substrates 

109. 8,603,293 
Plasma processing apparatus and method 

11/26/2013

108. 8,591,754 
Plasma processing apparatus and plasma processing method 

107. 8,591,752 
Plasma processing method 

11/19/2013 

106. 8,585,862 
Plasma processing device and plasma discharge state monitoring device 

105. 8,585,844 
Extending lifetime of yttrium oxide as a plasma chamber material 
 

11/12/2013 

104. 8,580,689 
Plasma processing method 

103. 8,580,354 
Plasma treatment of substrates prior to deposition 

102. 8,580,131 
Plasma etching method 

101. 8,580,077 
Plasma processing apparatus for performing accurate end point detection 

100. 8,580,076 
Plasma apparatus, gas distribution assembly for a plasma apparatus and processes therewith 

11/5/2013 

99. 8,574,448 
Plasma generation method, cleaning method, and substrate processing method 

98. 8,573,154 
Plasma film forming apparatus 

97. 8,573,153 
Multi-part electrode for a semiconductor processing plasma reactor and method of replacing a portion of a multi-part electrode 

96. 8,573,151 
Microwave plasma processing apparatus, dielectric window for use in the microwave plasma processing apparatus, and method for manufacturing the dielectric window 

10/29/2013 

95.  8,569,178 
Plasma processing method and plasma processing apparatus 

94. 8,569,177 
Plasma processing apparatus and plasma processing method 

93. 8,568,662 
Plasma reaction apparatus, plasma reaction method using the same, plasma reaction method of persistent gas, and apparatus for decreasing NOx by occlusion catalyst 

92. 8,568,556 
Plasma processing apparatus and method for using plasma processing apparatus 

10/22/2013 

91. 8,563,619 
Methods and arrangements for plasma processing system with tunable capacitance 

90. 8,562,800 
Plasma generating apparatus and plasma processing apparatus 

89. 8,562,785 
Gas distribution showerhead for inductively coupled plasma etch reactor 

10/15/2013 

88. 8,558,134 
Plasma processing apparatus and plasma processing method 

87. 8,557,709 
Plasma processing apparatus and plasma processing method 

86. 8,557,702 
Plasma-enhanced atomic layers deposition of conductive material over dielectric layers 

85. 8,557,187 
Method and device for plasma-supported surface treatment 

84. 8,555,810 
Plasma dry etching apparatus having coupling ring with cooling and heating units 

10/8/2013 

83. 8,551,892 
Method for reducing dielectric constant of film using direct plasma of hydrogen 

82. 8,551,891 
Remote plasma burn-in 

81. 8,551,414 
High-voltage plasma producing apparatus 

80. 8,551,289 
Plasma processing apparatus 

10/1/2013 

79. 8,545,765 
Plasma treating apparatus 

78. 8,545,764 
Microplasma array 

77. 8,545,672 
Plasma processing apparatus 

76. 8,545,671 
Plasma processing method and plasma processing apparatus 

75. 8,545,670 
Plasma processing apparatus and plasma processing method 

74. 8,545,669 
Sensor array for measuring plasma characteristics in plasma processing environments 

73. 8,545,639 
Method of cleaning aluminum plasma chamber parts 

9/24/2013 

72. 8,540,844 
Plasma confinement structures in plasma processing systems 

71. 8,540,843 
Plasma chamber top piece assembly 

9/10/2013 

70. 8,530,006 
Localized plasma processing 

69. 8,529,830 
Plasma sterilizing-purifying device and method for air sterilizing and purify

68. 8,529,730 
Plasma processing apparatus 

67. 8,529,729 
Plasma processing chamber component having adaptive thermal conductor 

66.  8,528,835 
Plasma spray nozzle with internal injection   

9/3/2013   

65. 8,524,372 
Waterproof plasma treated footwear with liquid absorbing footbed 

64. 8,524,097 
Plasma deposition to increase adhesion 

63. 8,522,716 
Protective coating for a plasma processing chamber part and a method of use 

8/27/2013   

62. 8,518,284 
Plasma treatment apparatus and method for plasma-assisted treatment of substrates 

61. 8,518,209 
Apparatus for determining the endpoint of a cleaning or conditioning process in a plasma processing system 

60. 8,518,182 
Substrate processing apparatus 

8/20/2013    

59. 8,513,137 
Plasma

58. 8,512,816 
Method of fabricating thin film by microplasma processing and apparatus for same 

57. 8,512,511 
Mounting table and plasma processing apparatus 

56. 8,512,510 
Plasma processing method and apparatus

55. 8,512,509 
Plasma reactor gas distribution plate with radially distributed path splitting manifold 

8/6/2013    

54. 8,501,106 
Plasma generation system and plasma generation method 

53. 8,500,912 
Plasma processing method and plasma processing apparatus 

7/30/2013     

52. 8,497,631 
Polymer microcavity and microchannel devices and fabrication method 

51. 8,497,213 
Plasma processing method

50. 8,496,781 
Plasma processing apparatus

7/16/2013    

49. 8,486,291 
Plasma processing method

48. 8,485,162 
Plasma apparatus using a valve 

47. 8,485,128 
Movable ground ring for a plasma processing chamber 

46. 8,484,846 
Method of joining components for a composite showerhead electrode assembly for a plasma processing apparatus 

7/9/2013   

45. 8,480,914 
Multiple gas plasma forming method and ICP source 

44. 8,480,913 
Plasma processing method and apparatus with control of plasma excitation power 

43. 8,480,912 
Plasma processing apparatus and plasma processing method 

42. 8,480,850 
Plasma treatment system 

41. 8,480,849 
Substrate processing apparatus and electrode structure 

40. 8,480,848 
Plasma processing apparatus

7/2/2013 

39. 8,475,724 
Method and apparatus for plasma-treating porous body

38. 8,475,622 
Method of reusing a consumable part for use in a plasma processing apparatus 

6/18/2013   

37. 8,465,659 
Polymer layer removal on pzt arrays using a plasma etch 

6/4/2013 

36. 8,454,794 
Antenna for plasma processor and apparatus 

5/28/2013

35. 8,449,950 
In-situ deposition of battery active lithium materials by plasma spraying

5/21/2013      

34. 8,445,074 
Atmospheric plasma treatment of tire cords 

33. 8,444,806 
Plasma generator, plasma control method and method of producing substrate 

32. 8,444,458 
Plasma treated abrasive article and method of making same

5/14/2013    

31. 8,440,268 
Method and apparatus for growing plasma atomic layer 

30. 8,440,051 
Plasma processing chamber for bevel edge processing 

29. 8,440,050 
Plasma processing apparatus and method, and storage medium 

4/16/2013 

28. 8,420,547 
Plasma processing method 

4/9/2013

27. 8,414,985 
Plasma deposition of a thin film 

26. 8,414,980 
Method for hydrophobic and oleophobic modification of polymeric materials with atmospheric plasmas 

25. 8,414,736 
Plasma reactor with tiltable overhead RF inductive source 

24. 8,414,735 
Ring-shaped component for use in a plasma processing, plasma processing apparatus and outer ring-shaped member 

3/26/2013

23. 8,404,590 
Plasma processing method and storage medium 

22. 8,404,573 
Plasma processing method and apparatus 

21. 8,404,137
Plasma processing apparatus and plasma processing method 

20. 8,404,135 
Plasma cleaning for process chamber component refurbishment 

19. 8,404,050 
Plasma processing apparatus and method 

3/19/2013

18. 8,399,795 
Enhancing plasma surface modification using high intensity and high power ultrasonic acoustic waves 

17. 8,399,794 
Atmospheric pressure plasma, generating method, plasma processing method and component mounting method using same, and device using these methods

16. 8,398,815 
Plasma processing apparatus 

15. 8,398,783 
Workpiece de-chucking device of plasma reactor for dry-cleaning inside of reaction chamber and electrostatic chuck during workpiece de-chucking, and workpiece de-chucking method using the same 

3/12/2013

14. 8,394,233 
Electrode orientation and parallelism adjustment mechanism for plasma processing systems 

13. 8,394,232 
Plasma processing apparatus 

12. 8,394,231 
Plasma process device and plasma process method 

11. 8,394,230 
Plasma processing apparatus 

2/19/2013

10. 8,377,270 
Plasma processing apparatus, magnetoresistive device manufacturing apparatus, magnetic thin film forming method, and film formation control program 

9. 8,377,255 
Plasma processing apparatus and method of controlling distribution of a plasma therein 

8. 8,377,254 
Plasma processing apparatus 

7. 8,377,209 
Linear plasma source for dynamic (moving substrate) plasma processing 

2/12/2013

6. 8,372,761 
Plasma oxidation processing method, plasma processing apparatus and storage medium 

5. 8,372,758 
Combinatorial plasma enhanced deposition techniques 

4. 8,372,491 
Method for cold plasma treatment of plastic bottles and device for Implementing Same 

3. 8,372,239 
Plasma processing apparatus 

2/5/2013

2. 8,366,871 
Method and apparatus for cleaning and surface conditioning objects using plasma 

1.8,366,870 
Method and apparatus for plasma processing 

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Roger D. Corneliussen
Editor
www.maropolymeronline.com

Maro Polymer Links
Tel: 610 363 9920
Fax: 610 363 9921
E-Mail: cornelrd@bee.net  

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Copyright 2012 by Roger D. Corneliussen.
No part of this transmission is to be duplicated in any manner or forwarded by electronic mail without the express written permission of Roger D. Corneliussen
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** Date of latest addition; date of first entry is 2/5/2013.