Maro Publications

Sputtering

Patent Titles

From 06/14/2015 through 3/5/2013

Maro Encyclopedia

xxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxx 

Patent Titles

For earlier US Patent titles, go to Sorted Patents /Coatings /Sputtering.

3/17/2015

8,980,446
PVD hybrid method for depositing mixed crystal layers

8,980,072
Method and arrangement for redundant anode sputtering having a dual anode arrangement

3/10/2015

8,974,648
Reactive sputtering method and reactive sputtering apparatus

3/3/2015

8,968,538
Sputtering device and sputtering method

8,968,537
PVD sputtering target with a protected backing plate

8,968,536
Sputtering target having increased life and sputtering uniformity

8,968,491
Sputtering target and method for producing same

2/17/2015

8,956,515
Multilayer-film sputtering apparatus and method of forming multilayer film

8,956,512
Magnetron sputtering apparatus and film forming method

1/20/2015

8,936,706
Sputtering target with low generation of particles

12/30/2014

8,920,683
Sputtering target, transparent conductive film and transparent electrode

8,920,618
Combinatorial processing using high deposition rate sputtering

8,920,612
Process for fabrication of a sputter deposited fully dense electrolyte layer embedded in a high performance membrane electrolyte assembly of solid oxide fuel cell

12/23/2014

8,916,034
Thin-film forming sputtering system

12/16/2014

8,911,569
Sputtering target and method for producing same

12/9/2014

8,906,208 
Sputtering apparatus, sputtering method, and electronic device manufacturing method 

8,906,207 
Control of film composition in co-sputter deposition by using collimators 

12/2/2014

8,900,428 
Sputtering apparatus 

8,900,426 
Double-layer shutter sputtering apparatus 

8,900,423 
Low refractive index material by sputtering deposition method 

8,899,565 
Sputtering device with gas injection assembly 

11/18/2014

8,889,547 
Sputtering and aligning multiple layers having different boundaries 

11/11/2014

8,883,250 
Methods of rejuvenating sputtering targets 

11/04/2014

8,877,021 
Chromic oxide powder for sputtering target, and sputtering target manufactured from such chromic oxide powder 

8,877,019
Sputtering apparatus, sputter deposition method, and analysis apparatus

10/21/2014

8,864,958 
Method and sputter-deposition system for depositing a layer composed of a mixture of materials and having a predetermined refractive index 

11/5/2013 

27. 8,574,412 
Magnet mounting system and magnetron sputtering device having same 

26. 8,574,411 
Reactive sputtering chamber with gas distribution tubes 

25. 8,574,410 
Method and apparatus for improved high power impulse magnetron sputtering 

24. 8,574,409 
Method of magnetron sputtering and a method for determining a power modulation compensation function for a power supply applied to a magnetron sputtering source 

10/29/2013 

23. 8,568,577 
Magnetron sputtering apparatus 

22. 8,568,576 
Sputtering target of nonmagnetic-particle-dispersed ferromagnetic material 

21. 8,568,572 
Very low pressure high power impulse triggered magnetron sputtering 

9/17/2013 

20. 8,535,496 
Sputter-coating apparatus 

19. 8,535,495 
Coating device 

18. 8,535,494 
Rotary magnet sputtering apparatu

9/3/2013 

17. 8,524,123 
Sputtering target, transparent conductive film and transparent electrode 

16. 8,524,054 
Loading device and sputtering device using same 

8/20/2013 

15. 8,512,530 
Sputtering apparatus 

8/6/2013 

14. 8,500,977 
Coating apparatus 

13. 8,500,976 
Rotatable sputtering magnetron with high stiffness 

12. 8,500,975 
Method and apparatus for sputtering onto large flat panels 

11. 8,500,974 
Carrier and sputtering device using the same 

10. 8,500,973 
Anode for sputter coating

5/7/2013 

9. 8,435,392 
Encapsulated sputtering target  

8. 8,435,389 
RF substrate bias with high power impulse magnetron sputtering (HIPIMS) 

7. 8,435,388 
Reactive sputter deposition processes and equipment 

6. 8,430,998 
Sputtering apparatus 

4/30/2013 

5. 8,430,998 
Sputtering apparatus 

4/2/2013

4. 8,409,407 
Methods for high-rate sputtering of a compound semiconductor on large area substrates 

3. 8,408,277 
Method and apparatus for production of rotatable sputtering targets 

3/26/2013

2. 8,404,089 
Sputtering method 

2/26/2013

1. 8,383,019 
Sputtering target, transparent conductive film and transparent electrode 

xxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxx 

Interested!!
Bookmark this page to follow future developments!.
(RDC 6/5/2012)

xxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxx 

Roger D. Corneliussen
Editor
www.maropolymeronline.com

Maro Polymer Links
Tel: 610 363 9920
Fax: 610 363 9921
E-Mail: cornelrd@bee.net  

***********************************

Copyright 2013 by Roger D. Corneliussen.
No part of this transmission is to be duplicated in any manner or forwarded by electronic mail without the express written permission of Roger D. Corneliussen
**************************************

** Date of latest addition; date of first entry is 3/5/2013.